Glossary entry (derived from question below)
Oct 19, 2008 10:02
15 yrs ago
Japanese term
Proposed translations
+4
4 mins
Selected
Pellicle
I think it's a typo of ペリクル
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Note added at 5 mins (2008-10-19 10:07:39 GMT)
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Pellicle, the protective cover which can be applied to a photomask used in semiconductor device fabrication. The pellicle protects the photomask from damage and dirt.
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Note added at 5 mins (2008-10-19 10:07:39 GMT)
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Pellicle, the protective cover which can be applied to a photomask used in semiconductor device fabrication. The pellicle protects the photomask from damage and dirt.
Reference:
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